including resonant
frequency, quality factor, stiction, quadrature error, hysteresis,
spring constant, f3dB frequency, capacitance and leakage. This dynamic
behavior data can then be used to validate MEMS designs, monitor MEMS
fabrication processes and drive product quality improvements, resulting
in increased wafer-level and package-level test yields and decreased
DPM rates, yielding your highest return on investment.
The STI3000 system applications include wafer level characterization,
qualification and high volume production testing. During initial MEMS
product development, the STI3000 can be used for wafer level
characterization to expedite the MEMS product time to market. During
MEMS qualification, the STI3000 can be used to validate the MEMS design
and to act as the final process monitor metric for validating and
improving process controls of critical MEMS fabrication steps before
launching into production. During MEMS production, the STI3000 provides
the fastest test times and highest test coverage for MEMS dynamic
behavior measurements, resulting in lower manufacturing costs.
A standard STI3000 wafer probe test system consists of an industry
standard or custom prober interfaced to an STI9000 Mixed-Signal Tester,
an STI3000E Test Head (with external power supply), product
configurable probe ring insert(s), and STI test software running on a
standard Windows PC (see system configuration diagram below). The
STI3000 is a standard test platform that is easily configured for
different product types and is scalable for increased capacity. The
simple and robust test configuration results in low maintenance and
support for product development and manufacturing organizations.
Solidus provides operator, maintenance and engineering training with
every system, including a complete documentation set. Solidus
Technologies can provide the test system as a complete turnkey
solution, or supply and customize any portions of the system based on
your exact needs.
Universities, make sure to call for Academic Pricing, significant discounts may apply!
STI3000
Wafer Probe Test System Product Sheet (PDF)
Boston Semi Equipment (BSE) offers the Odyssey Series prober, fully configured to a wide variety of standard and custom probe requirements. Existing EG2001 users can take advantage of the updated Odyssey technology by upgrading their existing equipment or by trading it in for a new Odyssey unit. Both Odyssey and EG probers seamlessly integrate with the Solidus STI3000 MEMS tester. When compared to the EG2001, the Odyssey design achieves better accuracy, improved reliability, greater throughput, and offers numerous software and networking advantages. This platform is the perfect fit for customers that are looking to customize a prober to their needs or that are simply looking to continue with low cost soft-dock wafer sort, without the hassle of slow, obsolete hardware and software.
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